The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2014
Filed:
Jul. 03, 2012
Applicant:
Hideki Shibata, Kyoto, JP;
Inventor:
Hideki Shibata, Kyoto, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 7/00 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01); G05B 19/418 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67276 (2013.01); H01L 21/67736 (2013.01); G05B 2219/45032 (2013.01); G05B 19/41865 (2013.01);
Abstract
A control apparatus in a substrate treating system with a substrate treating apparatus having a physical load port for receiving pods for storing substrates, and a carrier transport system for transporting the pods to and from the physical load port. The control apparatus includes a virtual load port control device for allotting a virtual load port to the physical load port, and instructing the carrier transport system to perform a transporting operation to and from the virtual load port on an assumption that the virtual load port really exists.