The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2014
Filed:
Sep. 03, 2009
Applicants:
Akitoshi Okino, Yokohama, JP;
Hidekazu Miyahara, Katsushika-ku, JP;
Inventors:
Akitoshi Okino, Yokohama, JP;
Hidekazu Miyahara, Katsushika-ku, JP;
Assignee:
Other;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H05H 1/00 (2006.01); H05H 1/24 (2006.01); H05H 1/46 (2006.01);
U.S. Cl.
CPC ...
H05H 1/24 (2013.01); H05H 1/0006 (2013.01); H05H 1/46 (2013.01);
Abstract
The plasma temperature control apparatus includes a plasma generating sectionthat turns a plasma-generating gas into plasma, and a plasma-generating gas temperature control sectionthat controls the temperature of the plasma-generating gas supplied to the plasma generating section. The temperature of the plasma generated in the plasma generating sectionis controlled by controlling the temperature of the plasma-generating gas.