The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 21, 2014

Filed:

Jun. 05, 2012
Applicants:

Glen R. Fox, Colorado Springs, CO (US);

Ronald G. Polcawich, Derwood, MD (US);

Daniel M. Potrepka, Silver Spring, MD (US);

Inventors:

Glen R. Fox, Colorado Springs, CO (US);

Ronald G. Polcawich, Derwood, MD (US);

Daniel M. Potrepka, Silver Spring, MD (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 41/04 (2006.01); H01L 41/318 (2013.01); H01L 41/187 (2006.01); H01L 41/319 (2013.01); H01L 41/08 (2006.01); C30B 23/02 (2006.01); C30B 29/32 (2006.01); C30B 29/02 (2006.01);
U.S. Cl.
CPC ...
C30B 29/02 (2013.01); H01L 41/318 (2013.01); H01L 41/1876 (2013.01); H01L 41/319 (2013.01); H01L 41/0815 (2013.01); H01L 41/081 (2013.01); C30B 23/02 (2013.01); C30B 29/32 (2013.01);
Abstract

A method for forming an electrical device having a {100}-textured platinum electrode comprising: depositing a textured metal thin film onto a substrate; thermally oxidizing the metal thin film by annealing to convert it to a rocksalt structure oxide with a {100}-texture; depositing a platinum film layer; depositing a ferroelectric film. An electrical device comprising a substrate; a textured layer formed on the substrate comprising metal oxide having a rocksalt structure; a first electrode film layer having a crystallographic texture acting as a template; and at least one ferroelectric material layer exhibiting spontaneous polarization epitaxially deposited on the first electrode film layer whereby the rocksalt structure of the textured layer facilitates the growth of the first electrode film layer with a {100} orientation which forms a template for the epitaxial deposition of the ferroelectric layer such that the ferroelectric layer is formed with an {001} orientation.


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