The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2014
Filed:
Nov. 08, 2012
International Business Machines Corporation, Armonk, NY (US);
Qing Cao, Yorktown Heights, NY (US);
Sunfei Fang, LaGrangeville, NY (US);
Zhengwen Li, Danbury, CT (US);
Fei Liu, Yorktown Heights, NY (US);
Zhen Zhang, Ossining, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
In one aspect, a memory cell capacitor is provided. The memory cell capacitor includes a silicon wafer; at least one trench in the silicon wafer; a silicide within the trench that serves as a bottom electrode of the memory cell capacitor, wherein a contact resistance between the bottom electrode and the silicon wafer is from about 1×10ohm-cmto about 1×10ohm-cm; a dielectric in the trench covering the bottom electrode; and a top electrode in the trench separated from the bottom electrode by the dielectric.