The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 21, 2014

Filed:

Oct. 06, 2009
Applicants:

Wei Xia, Irvine, CA (US);

Xiangdong Chen, Irvine, CA (US);

Akira Ito, Irvine, CA (US);

Inventors:

Wei Xia, Irvine, CA (US);

Xiangdong Chen, Irvine, CA (US);

Akira Ito, Irvine, CA (US);

Assignee:

Broadcom Corporation, Irvine, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/08 (2006.01); H01L 23/498 (2006.01); H01L 21/768 (2006.01); H01L 21/48 (2006.01); H01L 23/14 (2006.01);
U.S. Cl.
CPC ...
H01L 23/49827 (2013.01); H01L 2924/15311 (2013.01); H01L 23/49822 (2013.01); H01L 21/76898 (2013.01); H01L 21/486 (2013.01); H01L 2224/16225 (2013.01); H01L 23/147 (2013.01); H01L 2223/6677 (2013.01);
Abstract

According to an exemplary embodiment, an interposer structure for electrically coupling a semiconductor die to a support substrate in a semiconductor package includes at least one through-wafer via extending through a semiconductor substrate, where the at least one through-wafer via provides an electrical connection between the semiconductor die and the support substrate. The interposer structure further includes a passive component including a trench conductor, where the trench conductor extends through the semiconductor substrate. The passive component further includes a dielectric liner situated between the trench conductor and the semiconductor substrate. The passive component can further include at least one conductive pad for electrically coupling the trench conductor to the semiconductor die. The passive component can be, for example, an inductor or an antenna.


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