The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2014
Filed:
Feb. 27, 2009
Christopher A. Bower, Raleigh, NC (US);
Kristin Hedgepath Gilchrist, Durham, NC (US);
Brian R. Stoner, Chapel Hill, NC (US);
Dorota Temple, Cary, NC (US);
Christopher A. Bower, Raleigh, NC (US);
Kristin Hedgepath Gilchrist, Durham, NC (US);
Brian R. Stoner, Chapel Hill, NC (US);
Dorota Temple, Cary, NC (US);
Research Triangle Institute, Research Triangle Park, NC (US);
Abstract
A detector array and method for making the detector array. The array includes a substrate including a plurality of trenches formed therein, and includes a plurality of collectors electrically isolated from each other, formed on the walls of the trenches, and configured to collect charge particles incident on respective ones of the collectors and to output from said collectors signals indicative of charged particle collection. The array includes a plurality of readout circuits disposed on a side of the substrate opposite openings to the collectors. The readout circuits are configured to read charge collection signals from respective ones of the plurality of collectors.