The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2014
Filed:
Dec. 30, 2011
Hyun Sang Joo, Seo-gu, KR;
Dong Chul Seo, Chungcheongnam-do, KR;
Dae Kyung Yoon, Daejeon, KR;
Dae Hyeon Shin, Seoul, KR;
Hyun Sang Joo, Seo-gu, KR;
Dong Chul Seo, Chungcheongnam-do, KR;
Dae Kyung Yoon, Daejeon, KR;
Dae Hyeon Shin, Seoul, KR;
Korea Kumho Petrochemical Co., Ltd., Seoul, KR;
Abstract
A sulfonium compound represented by formula (1), a photo-acid generator, and a method for producing a sulfonium compound are provided: wherein X represents an electron-donating group; Rand Reach represent an alkyl group, a cycloalkyl group, or the like; Rand Reach represent an arylene group or a heteroarylene group; Rand Reach represent an alkyl group, a cycloalkyl group, or the like; and Aand Bare anions that are different from each other. The sulfonium compound, when used as a photo-acid generator, can produce a uniform and excellent resist pattern.