The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8865548 B1

PDF
Full Text
Expired
Date of Patent:
Oct. 21, 2014

Filed:

Jan. 08, 2013
Applicant:

Commissariat a L'energie Atomique ET Aux Ene Alt, Paris, FR;

Inventors:

Christelle Charpin-Nicolle, Fontanil-Cornillon, FR;

Eric Jalaguier, Saint Martin d'Uriage, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/336 (2006.01); H01L 29/423 (2006.01); H01L 29/78 (2006.01); H01L 21/28 (2006.01); H01L 29/66 (2006.01); H01L 29/792 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66484 (2013.01); H01L 29/4234 (2013.01); H01L 29/7831 (2013.01); H01L 21/28282 (2013.01); H01L 29/66833 (2013.01); H01L 29/792 (2013.01);
Abstract

A method of making a non-volatile double-gate memory cell. The gate of the control transistor is formed with a relief of a semiconductor material on a substrate. The control gate of the memory transistor is formed with a sidewall of the relief of a semiconductor material configured to store electrical charge. A first layer is deposited so as to cover the stack of layers. The first layer is etched so as to form a first pattern juxtaposed on the relief. A second layer is formed on the first pattern. The second layer is etched so as to form on the first pattern a second pattern having a substantially plane upper face.


Find Patent Forward Citations

Charpin-Nicolle, Christelle. (2014). Method of making a non-volatile double gate memory cell (U.S. Patent No. 8865548). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8865548

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