The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2014
Filed:
Dec. 23, 2011
Kai Wei Nieh, Monrovia, CA (US);
Jiuh-ming Liang, Hacienda Heights, CA (US);
Victor Krasnov, Tarzana, CA (US);
Kai Wei Nieh, Monrovia, CA (US);
Jiuh-Ming Liang, Hacienda Heights, CA (US);
Victor Krasnov, Tarzana, CA (US);
Front Edge Technology Inc., Baldwin Park, CA (US);
Abstract
A method of depositing lithium-containing films on a battery substrate in a sputtering chamber is provided. At least one pair of sputtering targets that each comprise a lithium-containing sputtering member is provided in the sputtering chamber, the sputtering targets selected to each have a conductivity of at least about 5×10S·cm. A substrate carrier holding at least one battery substrate is placed in the sputtering chamber. A pressure of sputtering gas is maintained in the sputtering chamber. The sputtering gas is energized by applying to the pair of sputtering targets, an electrical power at a frequency of from about 10 to about 100 kHz.