The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2014
Filed:
Jun. 15, 2012
Applicants:
Daisuke Yuki, Yokohama, JP;
Takahiro Miike, Yokohama, JP;
Hiroshi Mori, Tokyo, JP;
Inventors:
Assignee:
Nikon Corporation, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B32B 38/18 (2006.01); H01L 21/18 (2006.01); H01L 21/687 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68721 (2013.01); H01L 21/187 (2013.01); H01L 21/68728 (2013.01); H01L 21/67092 (2013.01); H01L 21/6833 (2013.01); H01L 21/68764 (2013.01); H01L 21/68785 (2013.01); B32B 38/18 (2013.01);
Abstract
A substrate holder pair comprising a first substrate holder and a second substrate holder that holds a first substrate and a second substrate bonded to each other, between itself and the first substrate holder. The first substrate holder includes a pressure receiving portion that, when the first substrate holder is separated from the second substrate holder, is pressed by a pressing member, and the second substrate holder includes a passing portion through which passes the pressing member, to enable pressing of the pressure receiving portion by the pressing member.