The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2014
Filed:
May. 10, 2011
Takashi Kasai, Kusatsu, JP;
Yuki Uchida, Kyoto, JP;
Yasuhiro Horimoto, Kusatsu, JP;
Sebastiano Conti, Messina, IT;
Takashi Kasai, Kusatsu, JP;
Yuki Uchida, Kyoto, JP;
Yasuhiro Horimoto, Kusatsu, JP;
Sebastiano Conti, Messina, IT;
OMRON Corporation, Kyoto-Shi, Kyoto, JP;
STMicroelectronics Srl, Agrate Brianza Milano, IT;
Abstract
An acoustic sensor includes: a semiconductor substrate; a vibrating membrane, formed above the semiconductor substrate, which includes a vibrating electrode; and a fixed membrane, formed on an upper surface of the semiconductor substrate, which includes a fixed electrode, the acoustic sensor detecting an acoustic wave according to a change in capacitance between the vibrating electrode and the fixed electrode. The fixed membrane has a plurality of sound hole portions formed therein in order to allow the acoustic wave to reach the vibrating membrane from outside, and the fixed electrode is formed so that a boundary of an edge portion of the fixed electrode does not intersect the sound hole portions.