The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2014
Filed:
Jul. 30, 2012
Takeshi Kondoh, Kawasaki, JP;
Takeshi Kondoh, Kawasaki, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A wavefront measuring apparatus includes an optical element forming a periodic pattern by light, a detector having pixels to detect the light, and a computer computing, based on detection results of the detector, wavefront information at positions in a wavefront of the light transmitted through or reflected by a specimen. The detector detects a first periodic pattern formed by the light, and a second periodic pattern formed by the light and shifted in phase from the first periodic pattern. The computer computes the wavefront information at one of the positions by using a result detected in a first pixel of the pixels when detecting the first periodic pattern, a result detected in a second pixel of the pixels when detecting the first periodic pattern, the second pixel being positioned within three pixels from the first pixel, and a result detected in the first pixel when detecting the second periodic pattern.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile