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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8859043 B1

PDFFull Text
Date of Patent:
Oct. 14, 2014

Filed:

May. 10, 2012

Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the same

Applicants:

Dong-kyu Lee, Yongin, KR;

Mu-hyun Kim, Yongin, KR;

Young-rok Song, Yongin, KR;

Sang-pil Lee, Yongin, KR;

Jung-bae Song, Yongin, KR;

Jong-heon Kim, Yongin, KR;

Byung-su Kim, Yongin, KR;

Yun-mi Lee, Yongin, KR;

Jae-kwang Ryu, Yongin, KR;

Inventors:

Dong-Kyu Lee, Yongin, KR;

Mu-Hyun Kim, Yongin, KR;

Young-Rok Song, Yongin, KR;

Sang-Pil Lee, Yongin, KR;

Jung-Bae Song, Yongin, KR;

Jong-Heon Kim, Yongin, KR;

Byung-Su Kim, Yongin, KR;

Yun-Mi Lee, Yongin, KR;

Jae-Kwang Ryu, Yongin, KR;

Assignee:

Samsung Display Co., Ltd., Yongin-si, KR;

Attorney:

Christie, Parker & Hale, LLP

Primary Examiner:

Joseph Miller, Jr

Int. Cl.
CPC ...
C23C 16/00 (2006.01); H01L 33/08 (2010.01); C23C 14/12 (2006.01); C23C 14/04 (2006.01); C23C 14/24 (2006.01);
U.S. Cl.
CPC ...
C23C 14/042 (2013.01); C23C 14/12 (2013.01); C23C 14/243 (2013.01);
Abstract

An organic layer deposition apparatus for forming an organic layer on a substrate includes: a deposition source configured to discharge a deposition material; a deposition source nozzle unit arranged at a side of the deposition source and including a plurality of deposition source nozzles; and a patterning slit sheet facing the deposition source nozzle unit and including a plurality of patterning slits and at least one spacer arranged between a pair of adjacent patterning slits of the plurality of patterning slits, the patterning slit sheet being smaller than the substrate in at least one of a first direction or a second direction perpendicular to the first direction, and the substrate is spaced apart from the organic layer deposition apparatus by a predetermined distance, and at least one of the substrate or the organic layer deposition apparatus is movable relative to the other.

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