The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2014
Filed:
Nov. 16, 2010
Applicants:
Koki Yano, Sodegaura, JP;
Masayuki Itose, Sodegaura, JP;
Inventors:
Koki Yano, Sodegaura, JP;
Masayuki Itose, Sodegaura, JP;
Assignee:
Idemitsu Kosan Co., Ltd., Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01B 1/02 (2006.01); C04B 35/453 (2006.01); H01L 29/786 (2006.01); C23C 14/34 (2006.01); C04B 35/626 (2006.01); C23C 14/08 (2006.01); C04B 35/01 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C23C 14/08 (2013.01); H01L 21/02554 (2013.01); C04B 2235/6567 (2013.01); C04B 2235/3293 (2013.01); H01L 21/02488 (2013.01); C04B 2235/80 (2013.01); H01L 21/02631 (2013.01); C04B 2235/6562 (2013.01); H01L 21/02381 (2013.01); C04B 2235/5409 (2013.01); C04B 2235/3286 (2013.01); C04B 2235/604 (2013.01); C04B 2235/656 (2013.01); C04B 2235/3284 (2013.01); C04B 35/453 (2013.01); H01L 21/02565 (2013.01); H01L 29/7869 (2013.01); C23C 14/3414 (2013.01); C04B 2235/963 (2013.01); C04B 2235/6565 (2013.01); C04B 35/6261 (2013.01); C04B 2235/664 (2013.01); C04B 35/01 (2013.01); C04B 35/62695 (2013.01); C04B 2235/6585 (2013.01);
Abstract
A sputtering target including an oxide sintered body which includes In, Ga and Zn and includes a structure having a larger In content than that in surrounding structures and a structure having larger Ga and Zn contents than those in surrounding structures.