The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2014
Filed:
Mar. 12, 2009
Yoshihiro Maeda, Tokyo, JP;
Fusao Ishii, Menlo Park, CA (US);
Kazuhiro Watanabe, Tokyo, JP;
Hirotoshi Ichikawa, Tokyo, JP;
Yoshihiro Maeda, Tokyo, JP;
Fusao Ishii, Menlo Park, CA (US);
Kazuhiro Watanabe, Tokyo, JP;
Hirotoshi Ichikawa, Tokyo, JP;
Other;
Abstract
A method for manufacturing a device comprising an elastic member on a substrate includes steps of: forming a sacrificial layer by forming a plurality of sacrificial sub-layers on the substrate; forming a plate member in or on the sacrificial layers connected to the substrate and substantially parallel to a top surface of the substrate; and removing the sacrificial sub-layers after forming the plate member by removing the sacrificial sub-layers in an order different from the reverse order of forming the sacrificial sub-layers.