The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 14, 2014

Filed:

Jan. 06, 2011
Applicants:

Jean-louis Guyaux, Chilly Mazarin, FR;

Franck Stemmelen, Vaureal, FR;

Olivier Grange, Saint-Cloud, FR;

Inventors:

Jean-Louis Guyaux, Chilly Mazarin, FR;

Franck Stemmelen, Vaureal, FR;

Olivier Grange, Saint-Cloud, FR;

Assignee:

Riber, Bezons, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23C 14/26 (2006.01); C23C 14/24 (2006.01);
U.S. Cl.
CPC ...
C23C 14/26 (2013.01); C23C 14/243 (2013.01);
Abstract

An injector for a vacuum evaporation source includes an injection duct () having a longitudinal axis () and an inlet port () able to be connected to a vacuum evaporation source, and at least one nozzle () for diffusing a vaporized material, the nozzle () having a lateral face (), and an upper face (). The nozzle () includes a main channel () emerging outside the injection duct () and at least a lateral feeding channel () connecting the interior of the injection duct () to the main channel (). The lateral feeding channel () has a lateral orifice () emerging inside the injection duct () through the lateral face () of the nozzle () for avoiding the clogging of the nozzle () by oxidized materials.


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