The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2014
Filed:
May. 21, 2009
Jeffrey Birkmeyer, San Jose, CA (US);
Darren T. Imai, Los Gatos, CA (US);
Andreas Bibl, Los Altos, CA (US);
Zhenfang Chen, Sunnyvale, CA (US);
Jeffrey Birkmeyer, San Jose, CA (US);
Darren T. Imai, Los Gatos, CA (US);
Andreas Bibl, Los Altos, CA (US);
Zhenfang Chen, Sunnyvale, CA (US);
FUJIFILM Corporation, Tokyo, JP;
Abstract
A method of forming an actuator includes depositing a photoimageable material to form a first photoimageable layer on a piezoelectric layer; patterning the first photoimageable layer to form an aperture; and disposing a first conductive layer on the first photoimageable layer. An actuator device formed by this method includes the photoimageable material. The first conductive layer partially overlies the first photoimageable layer such that a first portion of the first conductive layer contacts the first photoimageable layer and a second portion of the first conductive layer electrically contacts the piezoelectric layer in the aperture.