The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 07, 2014

Filed:

Jan. 02, 2013
Applicant:

Nikon Corporation, Tokyo, JP;

Inventors:

Isao Sugaya, Kawasaki, JP;

Takahiro Horikoshi, Chofu, JP;

Kazuya Okamoto, Yokohama, JP;

Assignee:

Nikon Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 17/50 (2006.01); B29C 65/00 (2006.01); B29C 65/78 (2006.01); B32B 37/00 (2006.01); B32B 41/00 (2006.01); B65C 9/00 (2006.01); H01L 23/00 (2006.01); H01L 25/00 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G06F 17/5081 (2013.01); H01L 2924/01006 (2013.01); H01L 2924/01074 (2013.01); H01L 2924/01004 (2013.01); H01L 2224/16 (2013.01); H01L 2224/7592 (2013.01); H01L 2924/01041 (2013.01); H01L 2225/06541 (2013.01); H01L 24/75 (2013.01); H01L 2225/06513 (2013.01); H01L 2924/01005 (2013.01); H01L 21/67092 (2013.01); H01L 2224/75251 (2013.01); H01L 25/50 (2013.01); G06F 17/5068 (2013.01); H01L 2924/01082 (2013.01); H01L 2924/01033 (2013.01); H01L 2224/75252 (2013.01);
Abstract

The terminals that oppose each other when substrates are bonded are designed to be reliably joined. Comprised in a semiconductor device design system are a numerical value acquiring part, which acquires the respective numerical values of a plurality of calculation parameters, a junction estimating part, which, in the case in which a plurality of substrates has been pressed at a prescribed pressure so that the bump front end faces come into contact, estimates whether or not the respective mutually opposing bumps will be joined based on the respective numerical values of the calculation parameters acquired by the numerical value acquiring part, and a change processing part, which, in the case in which it has been estimated by the junction estimating part that any of the bumps will not be joined, gives a warning or performs processing so as to change the numerical value of at least one calculation parameter among the plurality of calculation parameters.


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