The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2014
Filed:
Sep. 14, 2012
Applicants:
Sheng-shian LI, Taoyuan County, TW;
Cheng-syun LI, Hsinchu, TW;
Inventors:
Sheng-Shian Li, Taoyuan County, TW;
Cheng-Syun Li, Hsinchu, TW;
Assignee:
National Tsing Hua University, Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03B 5/30 (2006.01); H03H 9/05 (2006.01); H03H 9/24 (2006.01);
U.S. Cl.
CPC ...
Abstract
A capacitively-driven Micro-Electro-Mechanical System (MEMS) resonator is provided, in which a piezoresistively differential measurement is used to enable the MEMS resonator to transfer a signal. The MEMS resonator uses a Complementary Metal-Oxide-Semiconductor (CMOS) manufacturing process to make its oscillator and piezoresistor to achieve electrical insulation, thereby lowering the level of feedthrough signal.
Li, Sheng-Shian. (2014). Mems resonator, manufacturing method thereof, and signal processing method using mems resonator (U.S. Patent No. 8854149). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8854149
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile