The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2014
Filed:
Sep. 14, 2012
Seong-il Kim, Daejeon, KR;
Sang-heung Lee, Daejeon, KR;
Jong-won Lim, Daejeon, KR;
Hyung Sup Yoon, Daejeon, KR;
Jongmin Lee, Daejeon, KR;
Byoung-gue Min, Daejeon, KR;
Jae Kyoung Mun, Daejeon, KR;
Eun Soo Nam, Daejeon, KR;
Seong-il Kim, Daejeon, KR;
Sang-Heung Lee, Daejeon, KR;
Jong-Won Lim, Daejeon, KR;
Hyung Sup Yoon, Daejeon, KR;
Jongmin Lee, Daejeon, KR;
Byoung-Gue Min, Daejeon, KR;
Jae Kyoung Mun, Daejeon, KR;
Eun Soo Nam, Daejeon, KR;
Electronics and Telecommunications Research Institute, Daejeon, KR;
Abstract
Provided are vertical capacitors and methods of forming the same. The formation of the vertical capacitor may include forming input and output electrodes on a top surface of a substrate, etching a bottom surface of the substrate to form via electrodes, and then, forming a dielectric layer between the via electrodes. As a result, a vertical capacitor with high capacitance can be provided in a small region of the substrate.