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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8853800 B1

PDFFull Text
Expired
Date of Patent:
Oct. 07, 2014

Filed:

Jul. 07, 2011

Integrated device of the type comprising at least a microfluidic system and further circuitry and corresponding integration process

Applicants:

Claudia Caligiore, Giarre, IT;

Salvatore Leonardi, Aci S. Antonio, IT;

Salvatore Baglio, San Giovanni La Punta, IT;

Bruno Ando′, Aci Catena, IT;

Inventors:

Claudia Caligiore, Giarre, IT;

Salvatore Leonardi, Aci S. Antonio, IT;

Salvatore Baglio, San Giovanni La Punta, IT;

Bruno Ando′, Aci Catena, IT;

Assignee:

STMicroelectronics S.r.l., Agrate Brianza (MB), IT;

Attorney:

Graybeal Jackson LLP

Primary Examiner:

Tran Tran

Int. Cl.
CPC ...
H01L 29/84 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00246 (2013.01); B81B 2201/032 (2013.01); B81B 2203/0338 (2013.01); B81B 2201/058 (2013.01);
Abstract

An embodiment relates to a device integrated on a semiconductor substrate of a type comprising at least one first portion for the integration of at least one microfluidic system, and a second portion for the integration of an additional circuitry. The microfluidic system comprises at least one cavity realized in a containment layer of the integrated device closed on top by at least one portion of a polysilicon layer, this polysilicon layer being a thin layer shared by the additional circuitry and the closing portion of the cavity realizing a piezoresistive membrane for the microfluidic system.

Find Patent Forward Citations

Caligiore, Claudia. (2014). Integrated device of the type comprising at least a microfluidic system and further circuitry and corresponding integration process (U.S. Patent No. 8853800). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8853800

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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