The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2014
Filed:
Nov. 06, 2007
Applicants:
Hyun-jae Kim, Seongnam, KR;
Myung-koo Kang, Seoul, KR;
Inventors:
Hyun-Jae Kim, Seongnam, KR;
Myung-Koo Kang, Seoul, KR;
Assignee:
Samsung Display Co., Ltd., , KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B23K 26/00 (2014.01); G03B 27/52 (2006.01); H01L 21/20 (2006.01); B23K 26/02 (2014.01); H01L 29/786 (2006.01); B23K 26/06 (2014.01); H01L 29/66 (2006.01); H01L 27/12 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 27/1285 (2013.01); H01L 21/0268 (2013.01); B23K 26/02 (2013.01); H01L 29/78675 (2013.01); B23K 26/0656 (2013.01); H01L 21/02532 (2013.01); H01L 29/66757 (2013.01); H01L 27/1296 (2013.01);
Abstract
A device for irradiating a laser beam onto an amorphous silicon thin film formed on a substrate. The device includes: a stage mounting the substrate; a laser oscillator for generating a laser beam; a projection lens for focusing and guiding the laser beam onto the thin film; a reflector for reflecting the laser beam guided onto the thin film; a controller for controlling a position of the reflector; and an absorber for absorbing the laser beam reflected by the reflector.