The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 07, 2014

Filed:

Oct. 06, 2011
Applicants:

Sung Yong Min, Gwangju, KR;

Tae Sik Kim, Hanam-si, KR;

Tae-woo Lee, Pohang-si, KR;

Inventors:

Sung Yong Min, Gwangju, KR;

Tae Sik Kim, Hanam-si, KR;

Tae-Woo Lee, Pohang-si, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); B81C 1/00 (2006.01); H01L 51/00 (2006.01); H01L 51/10 (2006.01); H01L 51/42 (2006.01); H01L 51/05 (2006.01);
U.S. Cl.
CPC ...
H01L 51/0005 (2013.01); B81C 1/00031 (2013.01); H01L 51/0023 (2013.01); H01L 51/102 (2013.01); H01L 51/0016 (2013.01); H01L 51/0545 (2013.01); H01L 51/428 (2013.01); H01L 51/0541 (2013.01);
Abstract

Provided is a method of forming a micropattern according to an aspect of the present invention. The method of forming a micropattern may include forming an organic wire or organic-inorganic hybrid wire mask pattern having a circular or elliptical cross section on a substrate, forming a material layer on an entire surface of the substrate having the organic wire or organic-inorganic hybrid wire mask pattern formed thereon, and removing the organic wire or organic-inorganic hybrid wire mask pattern from the substrate to allow only the material layer on a portion of the substrate having no organic wire or organic-inorganic hybrid wire mask pattern formed thereon to be remained.


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