The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 07, 2014

Filed:

Feb. 12, 2013
Applicant:

Hgst Netherlands B.v., Amsterdam, NL;

Inventors:

Matthew J. Carey, San Jose, CA (US);

Shekar B. Chandrashekariaih, San Jose, CA (US);

Jeffrey R. Childress, San Jose, CA (US);

Young-suk Choi, Los Gatos, CA (US);

John Creighton Read, San Jose, CA (US);

Assignee:

HGST Netherlands B.V., Amsterdam, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 43/12 (2006.01);
U.S. Cl.
CPC ...
H01L 43/12 (2013.01);
Abstract

A method for making a current-perpendicular-to-the-plane (CPP) magnetoresistive (MR) sensor that has a reference layer with low coercivity includes first depositing, within a vacuum chamber, a seed layer and an antiferromagnetic layer on a substrate without the application of heat. The substrate with deposited layers is then heated to between 200-600° C. for between 1 to 120 minutes. The substrate with deposited layers is then cooled, preferably to room temperature (i.e., below 50° C., but to at least below 100° C., in the vacuum chamber. After cooling of the antiferromagnetic layer, the ferromagnetic reference layer is deposited on the antiferromagnetic layer. Then the substrate with deposited layers is removed from the vacuum chamber and subjected to a second annealing, in the presence of a magnetic field, by heating to a temperature between 200-400° C. for between 0.5-50 hours.


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