The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2014
Filed:
Aug. 04, 2011
Applicants:
Uno Chang, Yongin, KR;
Jae-kwang Ryu, Yongin, KR;
Eun-sun Choi, Yongin, KR;
Byung-su Kim, Yongin, KR;
Inventors:
Uno Chang, Yongin, KR;
Jae-Kwang Ryu, Yongin, KR;
Eun-Sun Choi, Yongin, KR;
Byung-Su Kim, Yongin, KR;
Assignee:
Samsung Display Co., Ltd., Yongin-si, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05D 3/00 (2006.01); C23C 16/52 (2006.01); C23C 16/44 (2006.01); C23C 14/24 (2006.01); C23C 14/12 (2006.01); C23C 14/04 (2006.01); C23C 14/56 (2006.01); H01L 51/56 (2006.01);
U.S. Cl.
CPC ...
C23C 14/12 (2013.01); C23C 14/243 (2013.01); H01L 51/56 (2013.01); C23C 14/042 (2013.01); C23C 14/568 (2013.01);
Abstract
An organic layer deposition apparatus for forming an organic layer while a substrate is being moved, in which an interval between the substrate and the organic layer deposition apparatus can be measured at a vacuum condition.