The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2014
Filed:
Apr. 16, 2009
Applicant:
Thomas Peter Brody, Pittsburgh, PA (US);
Inventor:
Thomas Peter Brody, Pittsburgh, PA (US);
Assignee:
Advantech Global, Ltd, Tortola, VG;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/04 (2006.01); C23C 14/24 (2006.01); C23C 14/56 (2006.01); B08B 7/00 (2006.01); B08B 13/00 (2006.01); H01L 51/00 (2006.01); H01L 27/12 (2006.01); H01L 29/786 (2006.01);
U.S. Cl.
CPC ...
C23C 14/042 (2013.01); H01L 51/0011 (2013.01); C23C 14/564 (2013.01); H01L 27/1214 (2013.01); B08B 7/0035 (2013.01); H01L 29/78681 (2013.01); B08B 13/00 (2013.01);
Abstract
Electronic devices are formed on a substrate that is advanced stepwise through a plurality of deposition vessels. Each deposition vessel includes a source of deposition material and has at least two shadow masks associated therewith. Each of the two masks is alternately positioned within the corresponding deposition vessel for patterning the deposition material onto the substrate through apertures in the mask positioned therein, and positioned in an adjacent cleaning vessel for mask cleaning. The patterning onto the substrate and the cleaning of at least one of the masks are performed concurrently.