The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2014
Filed:
Jul. 12, 2011
Applicant:
Henrik Obst, Dresden, DE;
Inventor:
Henrik Obst, Dresden, DE;
Assignee:
Von Ardenne Anlagentechnik GmbH, Dresden, DE;
Primary Examiner:
Int. Cl.
CPC ...
B65G 13/12 (2006.01); C23C 14/56 (2006.01);
U.S. Cl.
CPC ...
C23C 14/56 (2013.01); Y10S 198/95 (2013.01);
Abstract
A substrate treatment system for treating substrates includes a system chamber, delimited by chamber walls, at least one substrate treatment device and a transportation device inside the system chamber. The transportation device has an arrangement of transportation rollers arranged one behind the other in the transportation direction, for vertical or horizontal transportation of substrates. At least a first group of transportation rollers which are arranged immediately one behind the other, each has its own drive device.