The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2014
Filed:
Feb. 29, 2012
Seung MO Lim, Gyunggi-do, KR;
Sung Wook Kim, Gyunggi-do, KR;
Sung Jun Lee, Gyunggi-do, KR;
Kyo Yeol Lee, Gyunggi-do, KR;
Yun Sung Kang, Gyunggi-do, KR;
Seung Mo Lim, Gyunggi-do, KR;
Sung Wook Kim, Gyunggi-do, KR;
Sung Jun Lee, Gyunggi-do, KR;
Kyo Yeol Lee, Gyunggi-do, KR;
Yun Sung Kang, Gyunggi-do, KR;
Samsung Electro-Mechanics Co., Ltd., Gyunggi-Do, KR;
Abstract
Disclosed herein is an inertial sensor. The inertial sensoraccording to preferred embodiments of the present invention includes: a membrane; a mass bodydisposed under the membrane; a piezoelectric bodyformed on the membraneto drive the mass body; and trenchesformed by being collapsed in a thickness direction of the piezoelectric bodyso as to vertically meet a direction in which the mass bodyis driven. By this configuration, the trenches are formed by being collapsed in a thickness direction of the piezoelectric bodyto provide directivity while retaining the rigidity of the piezoelectric bodyto prevent a wave from being propagated in an unnecessary direction, thereby driving the inertial sensorin a desired specific direction.