The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2014
Filed:
Feb. 03, 2010
Applicant:
Volker Kempe, Lieboch, AT;
Inventor:
Volker Kempe, Lieboch, AT;
Assignee:
Maxim Integrated Products, Inc., San Jose, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/56 (2012.01); G01C 19/574 (2012.01);
U.S. Cl.
CPC ...
G01C 19/574 (2013.01);
Abstract
The invention relates to an electromechanic microsensor (MEMS) comprising drive elements which are moved linearly in an x-y plane and disposed on a substrate to determine at least two, preferably three, components of the yaw rate vector of a substrate, wherein two groups of drive elements are driven in directions running essentially at right angles to each other. The MEMS according to the invention is characterized in that the drive elements, which are moved at right angles to each other, are connected to one another to synchronize the movements via a coupling device that is rotatably mounted on the substrate.