The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 2014
Filed:
Jan. 11, 2010
Applicant:
Daniel Kost, Dresden, DE;
Inventor:
Daniel Kost, Dresden, DE;
Assignee:
GLOBALFOUNDRIES Inc., Grand Cayman, KY;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F 11/30 (2006.01); G05B 23/02 (2006.01);
U.S. Cl.
CPC ...
G05B 23/0221 (2013.01); G05B 23/024 (2013.01);
Abstract
During fault detection of a production process, the influence of the data communication process for communicating measurement readings to the fault detection system may be taken into consideration. In one illustrative embodiment, a data rate related parameter may be used as an input variable for a data reduction procedure, thereby enabling an efficient assessment of the quality of the remaining 'real' process and tool parameters.