The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 30, 2014

Filed:

Jul. 18, 2013
Applicants:

Marcel W. Pruessner, Silver Spring, MD (US);

Todd H. Stievater, Arlington, VA (US);

William S. Rabinovich, Silver Spring, MD (US);

Inventors:

Marcel W. Pruessner, Silver Spring, MD (US);

Todd H. Stievater, Arlington, VA (US);

William S. Rabinovich, Silver Spring, MD (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01); G01N 21/17 (2006.01); G01G 3/16 (2006.01); G01N 29/036 (2006.01);
U.S. Cl.
CPC ...
G01N 21/17 (2013.01); G01N 2291/0256 (2013.01); G01B 9/02051 (2013.01); G01G 3/165 (2013.01); G01B 2290/25 (2013.01); G01B 9/02004 (2013.01); G01N 29/036 (2013.01);
Abstract

A mass sensor system including multiple Fabry-Perot microcavities connected in parallel by multiple waveguides. Each of the mass sensors includes a microbridge having a fundamental resonance frequency, and a movable reflective mirror etched into the microbridge; a fixed reflective mirror etched in a substrate, the fixed reflective mirror being fixed to the substrate in a region spaced apart from the movable reflective mirror; and an optical waveguide etched in the substrate that connects the movable mirror and the fixed mirror forming the Fabry-Perot microcavity interferometer. The system includes a tunable continuous-wave laser operative to optically interrogate the Fabry-Perot microcavity of each of the plurality of mass sensors, and a receiver operative to receive sensor signals from each of the plurality of mass sensors, the sensor signals comprising reflective signals and transmitted signals. A continuous-wave laser may generate optical forces that modify the motion, dynamics, or mechanical Q-factor of the microbridge.


Find Patent Forward Citations

Loading…