The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 30, 2014

Filed:

Nov. 28, 2008
Applicants:

Tjalf Pirk, Stuttgart, DE;

Stefan Pinter, Reutlingen, DE;

Hubert Benzel, Pliezhausen, DE;

Heribert Weber, Nuertingen, DE;

Michael Krueger, Reutlingen, DE;

Robert Sattler, Regensberg, DE;

Frederic Njikam Njimonzie, Reutlingen, DE;

Joerg Muchow, Reutlingen, DE;

Joachim Fritz, Tuebingen, DE;

Christoph Schelling, Stuttgart, DE;

Christoph Friese, Reutlingen, DE;

Inventors:

Tjalf Pirk, Stuttgart, DE;

Stefan Pinter, Reutlingen, DE;

Hubert Benzel, Pliezhausen, DE;

Heribert Weber, Nuertingen, DE;

Michael Krueger, Reutlingen, DE;

Robert Sattler, Regensberg, DE;

Frederic Njikam Njimonzie, Reutlingen, DE;

Joerg Muchow, Reutlingen, DE;

Joachim Fritz, Tuebingen, DE;

Christoph Schelling, Stuttgart, DE;

Christoph Friese, Reutlingen, DE;

Assignee:

Robert Bosch GmbH, Stuttgart, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/788 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00103 (2013.01); B81B 2203/0118 (2013.01); B81B 2203/0307 (2013.01);
Abstract

In a micromechanical component having an inclined structure and a corresponding manufacturing method, the component includes a substrate having a surface; a first anchor, which is provided on the surface of the substrate and which extends away from the substrate; and at least one cantilever, which is provided on a lateral surface of the anchor, and which points at an inclination away from the anchor.


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