The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 2014
Filed:
Sep. 02, 2011
Hiroyuki Suhara, Yokohama, JP;
Hiroaki Tanaka, Kawasaki, JP;
Hidekazu Murata, Nagoya, JP;
Hiroshi Shimoyama, Kasugai, JP;
Hiroyuki Suhara, Yokohama, JP;
Hiroaki Tanaka, Kawasaki, JP;
Hidekazu Murata, Nagoya, JP;
Hiroshi Shimoyama, Kasugai, JP;
Ricoh Company, Ltd., Tokyo, JP;
Meijo University, Nagoya-shi, JP;
Abstract
A surface charge measuring distribution method includes the steps of irradiating a sample with a charged particle beam and charging a sample surface in a spot-like manner, irradiating the charged sample with the charged particle beam to measure a potential at a potential saddle point formed above the sample, selecting one of preset multiple structure models and a tentative space charge distribution associated with the selected structure model, calculating a space potential at the potential saddle point by electromagnetic field analysis using the selected structure model and tentative space charge distribution, comparing the calculated space potential and measured value to determine the tentative space charge distribution as a space charge distribution of the sample when an error between the space potential and the measured value is within a predetermined range, and calculating a surface charge distribution of the sample by electromagnetic field analysis based on the determined space charge distribution.