The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 30, 2014

Filed:

Dec. 04, 2009
Applicants:

Zhongke Wang, Singapore, SG;

Tao Chen, Singapore, SG;

Hongyu Zheng, Singapore, SG;

Inventors:

Zhongke Wang, Singapore, SG;

Tao Chen, Singapore, SG;

Hongyu Zheng, Singapore, SG;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/00 (2014.01); B23K 26/14 (2014.01); B23K 26/02 (2014.01); B23K 26/40 (2014.01); H01L 21/78 (2006.01);
U.S. Cl.
CPC ...
H01L 21/78 (2013.01); B23K 26/4075 (2013.01); B23K 2201/40 (2013.01);
Abstract

A method for cutting a semiconductor wafer by generating a crack within the wafer, and a system thereof, are provided. The method comprises irradiating a laser beam towards a surface of the wafer and converging the laser beam to form a focal point so that a focal volume defined by the focal point and a boundary of the laser beam within the wafer is formed. Energy encompassed within the focal volume causes the wafer located at the periphery of the focal volume to contract faster than the wafer located within the focal volume, thereby generating a crack within the wafer.


Find Patent Forward Citations

Wang, Zhongke. (2014). Wafer cutting method and a system thereof (U.S. Patent No. 8847104). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8847104

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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