The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 30, 2014

Filed:

May. 17, 2013
Applicants:

Dmitry Karshtedt, San Francisco, CA (US);

Joerg Rockenberger, San Jose, CA (US);

Fabio Zurcher, Brisbane, CA (US);

Brent Ridley, San Carlos, CA (US);

Erik Scher, San Francisco, CA (US);

Inventors:

Dmitry Karshtedt, San Francisco, CA (US);

Joerg Rockenberger, San Jose, CA (US);

Fabio Zurcher, Brisbane, CA (US);

Brent Ridley, San Carlos, CA (US);

Erik Scher, San Francisco, CA (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); C08G 77/00 (2006.01); C07F 7/02 (2006.01); C09D 183/16 (2006.01); C08G 77/60 (2006.01); H01L 27/12 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02628 (2013.01); H01L 27/1214 (2013.01); C09D 183/16 (2013.01); C08G 77/60 (2013.01); H01L 21/02282 (2013.01);
Abstract

Compositions and methods for controlled polymerization and/or oligomerization of hydrosilanes compounds including those of the general formulae SiHand SiHas well as alkyl- and arylsilanes, to produce soluble silicon polymers as a precursor to silicon films having low carbon content.


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