The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 2014
Filed:
Nov. 15, 2006
Teruhiko Kumada, Chiyoda-ku, JP;
Hideharu Nobutoki, Chiyoda-ku, JP;
Naoki Yasuda, Chiyoda-ku, JP;
Tetsuya Yamamoto, Nishinomiya, JP;
Yasutaka Nakatani, Himeji, JP;
Takuya Kamiyama, Takatsuki, JP;
Teruhiko Kumada, Chiyoda-ku, JP;
Hideharu Nobutoki, Chiyoda-ku, JP;
Naoki Yasuda, Chiyoda-ku, JP;
Tetsuya Yamamoto, Nishinomiya, JP;
Yasutaka Nakatani, Himeji, JP;
Takuya Kamiyama, Takatsuki, JP;
Nippon Shokubai Co., Ltd., Osaka, JP;
Abstract
A composition for chemical vapor deposition film-formation comprising a borazine compound represented by the Chemical Formula 1 satisfying at least one of a condition that content of each halogen atom in the composition is 100 ppb or less or a condition that content of each metal element in the composition is 100 ppb or less. In the Chemical Formula 1, Rmay be the same or different, and is hydrogen atom, alkyl group, alkenyl group or alkynyl group, and at least one thereof is hydrogen atom; Rmay be the same or different, and is hydrogen atom, alkyl group, alkenyl group or alkynyl group, and at least one thereof is alkyl group, alkenyl group or alkynyl group.