The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 30, 2014

Filed:

Aug. 28, 2013
Applicant:

Sony Corporation, Tokyo, JP;

Inventors:

Nobuyuki Kuboi, Tokyo, JP;

Shoji Kobayashi, Kanagawa, JP;

Assignee:

Sony Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/00 (2006.01); B44C 1/22 (2006.01); H01J 37/302 (2006.01); C23C 14/48 (2006.01); C23C 14/54 (2006.01); G01N 23/00 (2006.01); H01L 21/3213 (2006.01);
U.S. Cl.
CPC ...
G01N 23/00 (2013.01); H01J 37/3023 (2013.01); H01L 21/32137 (2013.01); C23C 14/48 (2013.01); C23C 14/54 (2013.01);
Abstract

An ion radiation damage prediction method includes a parameter computation step of computing the incidence energy and incidence angle of an incident ion hitting a fabricated object, and a step of searching for data in databases created in advance on the basis of the computed incidence energy and angle, the databases storing distributions of quantities of crystalline defects having an effect on the fabricated object, ion reflection probabilities and ion penetration depths. The method also includes finding the penetration depth and location of the incident ion based on the data found in the searching step and based on the computed incidence energy and angle, and computing a quantity of defects in the fabricated object from the penetration depth and location. A distribution of defects may be computed by performing the aforementioned steps for many incident ions.


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