The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 23, 2014

Filed:

Feb. 06, 2013
Applicant:

Dr. Johannes Heidenhain Gmbh, Traunreut, DE;

Inventors:

Wolfgang Holzapfel, Obing, DE;

Joerg Drescher, Samerberg, DE;

Markus Meissner, Uebersee, DE;

Ralph Joerger, Traunstein, DE;

Bernhard Musch, Otterfing, DE;

Thomas Kaelberer, Schrobenhausen, DE;

Assignee:

Johannes Heidenhain GmbH, Traunreut, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/14 (2006.01); H01L 21/68 (2006.01); G01B 11/00 (2006.01); G03F 7/20 (2006.01); H01L 21/67 (2006.01); G01D 5/347 (2006.01);
U.S. Cl.
CPC ...
G01B 11/002 (2013.01); G01D 5/34746 (2013.01); H01L 21/681 (2013.01); G03F 7/70775 (2013.01); H01L 21/67259 (2013.01);
Abstract

In a system for detecting the position of an object in relation to a reference system, the object is arranged so as to be movable in relation to the reference system along at least two orthogonal first and second main movement axes. To record the position of the object in relation to the reference system, a position measuring device includes at least two two-dimensional measuring standards situated along the first main movement axis, and four scanning units for an optical scanning of these measuring standards. In addition, at least four additional supplementary scanning units are provided, which are situated between the four scanning units along the first main movement axis.


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