The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 23, 2014

Filed:

Jul. 25, 2012
Applicants:

Hideaki Yamada, Kariya, JP;

Kazuhiko Kano, Toyoake, JP;

Inventors:

Hideaki Yamada, Kariya, JP;

Kazuhiko Kano, Toyoake, JP;

Assignee:

DENSO CORPORATION, Kariya, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/02 (2006.01); H01L 41/113 (2006.01); H03H 9/05 (2006.01); G01N 29/24 (2006.01); G01N 29/38 (2006.01); G01N 29/42 (2006.01);
U.S. Cl.
CPC ...
H01L 41/1132 (2013.01); H03H 9/058 (2013.01); H03H 9/02622 (2013.01); H03H 9/0585 (2013.01); G01N 29/2462 (2013.01); G01N 29/38 (2013.01); G01N 29/42 (2013.01); G01N 2291/0423 (2013.01);
Abstract

In a SAW device, a first area placed at a surface of a measurement subject directly under a propagation portion is fixed to the measurement subject, and a second area placed at the surface of the measurement subject directly under both a drive electrode and a reflector is not fixed to the measurement subject. When a strain is generated in the measurement subject, a strain is generated only in the propagation portion, and a phase change is generated in a surface acoustic wave reflected by the reflector. Because the phase change is hardly affected by a temperature change, the strain of the measurement subject can be measured based on the phase change. Because a resonant frequency of the SAW device is changed by the temperature change, but is not affected by the strain of the measurement subject, a temperature can be measured based on a resonant frequency change.


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