The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 23, 2014

Filed:

Oct. 06, 2013
Applicant:

Hitachi, Ltd., Tokyo, JP;

Inventors:

Yoshitaka Sasago, Tachikawa, JP;

Akio Shima, Hino, JP;

Satoru Hanzawa, Hachioji, JP;

Takashi Kobayashi, Higashimurayama, JP;

Masaharu Kinoshita, Tsukuba, JP;

Norikatsu Takaura, Tokyo, JP;

Assignee:

Hitachi, Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 47/00 (2006.01); H01L 45/00 (2006.01); H01L 27/22 (2006.01); H01L 27/24 (2006.01);
U.S. Cl.
CPC ...
H01L 45/12 (2013.01); H01L 45/1206 (2013.01); H01L 27/224 (2013.01); H01L 45/06 (2013.01); H01L 45/04 (2013.01); H01L 27/2409 (2013.01); H01L 45/1675 (2013.01); H01L 27/2481 (2013.01);
Abstract

Disclosed are a semiconductor storage device and a manufacturing method. The storage device has: a substrate; a first word line above the substrate; a first laminated body above the first word line and having N+1 first inter-gate insulating layers and N first semiconductor layers alternately laminated; a first bit line above the laminated body and extending in a direction that intersects the first word line; a first gate insulating layer on side surfaces of the first inter-gate insulating layers and the first semiconductor layers; a first channel layer on the side surface of the first gate insulating layer; and a first variable resistance material layer on the side surface of the first channel layer. The first variable resistance material layer is in a region where the first word line and the first bit line intersect. A polysilicon diode is used as a selection element.


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