The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 23, 2014

Filed:

May. 03, 2010
Applicants:

Jayshri Sabarinathan, London, CA;

Aref Bakhtazad, London, CA;

Xuan Huo, Toronto, CA;

Jeff Hutter, London, CA;

Inventors:

Jayshri Sabarinathan, London, CA;

Aref Bakhtazad, London, CA;

Xuan Huo, Toronto, CA;

Jeff Hutter, London, CA;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 9/00 (2006.01);
U.S. Cl.
CPC ...
G01L 9/0076 (2013.01);
Abstract

The present invention provides a microscale pressure sensor that exhibits high sensitivity in a small form factor. The sensor is a bridged device in which a photonic crystal waveguide, surrounded by a photonic crystal slab, is suspended over a dielectric substrate. Under applied pressure, the photonic crystal waveguide is deflected toward the substrate, causing a decrease in optical transmission across the waveguide due to the coupling of the evanescent field of the guided mode to the dielectric substrate. In a preferred embodiment, the waveguide is coupled to a photonic crystal microcavity, which increases evanescent coupling.


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