The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 16, 2014

Filed:

Aug. 22, 2009
Applicants:

Cristina Alvarez Diez, Aalen, DE;

Frank Hoeller, Aalen, DE;

Bernd Spruck, Moegglingen, DE;

Marc Tremont, Schorndorf, DE;

Inventors:

Cristina Alvarez Diez, Aalen, DE;

Frank Hoeller, Aalen, DE;

Bernd Spruck, Moegglingen, DE;

Marc Tremont, Schorndorf, DE;

Assignee:

Carl Zeiss AG, Oberkochen, DE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 11/24 (2006.01); G01B 11/14 (2006.01); G01B 11/00 (2006.01); G01S 7/481 (2006.01); G01S 17/10 (2006.01); G01S 13/46 (2006.01);
U.S. Cl.
CPC ...
G01B 11/002 (2013.01); G01B 11/24 (2013.01); G01S 7/4817 (2013.01); G01S 17/10 (2013.01); G01S 2013/466 (2013.01);
Abstract

A device for measuring a surface () comprises a light source (), a light directing device (-), a detector arrangement () and an evaluation circuit (). The light source () generates a sequence of light pulses with a repetition rate. The light directing device (-) is controllable to direct the sequence of light pulses onto a surface area () of the surface (). The surface area may be selected from plural surface areas (). The detector arrangement is configured to receive at least one light signal (-) scattered and/or reflected by the surface area (). The evaluation circuit () is coupled to the detector arrangement () and is configured to determine a phase difference between a reference signal () derived from the sequence of light pulses and a signal component of the at least one light signal (-), in order to determine a position of the surface area (). In doing so, the phase difference is determined for the signal component which has a frequency corresponding to a multiple of the repetition rate.


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