The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 16, 2014

Filed:

Jul. 15, 2010
Applicants:

Hiroshi Iwasawa, Hitachi, JP;

Masahiro Matsumoto, Hitachi, JP;

Toshiaki Nakamura, Hitachinaka, JP;

Inventors:

Hiroshi Iwasawa, Hitachi, JP;

Masahiro Matsumoto, Hitachi, JP;

Toshiaki Nakamura, Hitachinaka, JP;

Assignee:

Hitachi Automotive Systems, Ltd., Hitachinaka-shi, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 27/26 (2006.01); G01P 15/125 (2006.01); G01P 15/08 (2006.01); G01D 5/24 (2006.01); G01D 3/028 (2006.01); G01C 19/5726 (2012.01);
U.S. Cl.
CPC ...
G01P 15/125 (2013.01); G01P 15/0802 (2013.01); G01D 5/24 (2013.01); G01D 3/028 (2013.01); G01C 19/5726 (2013.01);
Abstract

The present invention provides a high-accuracy electrostatic capacitance type physical quantity sensor and angular velocity sensor configured so as to be capable of suppressing noise derived from internal noise while maintaining resistance to externally-incoming noise. A detection elementhas a movable masssupported displaceably by a physical quantity given from the outside, and a detection electrode Ef. A shield wireis disposed around wirings connected to the input of a capacitance detection circuitand is connected to a dc potential of low impedance. A value Cin of an input capacitance relative to a fixed potential of low impedance at a portion at which the detection elementis connected with the capacitance detection circuitis set to fall within a range of 1.5 pF<Cin<20 pF.


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