The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 16, 2014
Filed:
Oct. 04, 2013
Applicant:
SK Hynix Inc., Icheon-si, KR;
Inventor:
Seong Wan Ryu, Yongin-si, KR;
Assignee:
SK Hynix Inc., Icheon, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/28 (2006.01); H01L 29/51 (2006.01);
U.S. Cl.
CPC ...
H01L 21/28008 (2013.01); H01L 29/51 (2013.01);
Abstract
A method for manufacturing a semiconductor device includes forming a device isolation film defining an active region, forming a recess configured to expose a seam contained in the device isolation film by etching the active region and the device isolation film, forming a sacrificial film to fill the exposed seam, and forming a gate at a lower part of the recess.