The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 16, 2014
Filed:
May. 24, 2013
Samsung Electronics Co., Ltd., Suwon-si, KR;
Joon-Seok Moon, Seoul, KR;
Jae-Rok Kahng, Seoul, KR;
Hyun-Seung Song, Incheon, KR;
Dong-Soo Woo, Seoul, KR;
Sang-Hyun Lee, Seoul, KR;
Hyun-Jung Lee, Seongnam-si, KR;
Abstract
Methods of fabricating semiconductor device are provided including forming first through third silicon crystalline layers on first through third surfaces of an active region; removing the first silicon crystalline layer to expose the first surface; forming a bit line stack on the exposed first surface; forming bit line sidewall spacers on both side surfaces of the bit line stack to be vertically aligned with portions of the second and third silicon crystalline layers of the active region; removing the second and third silicon crystalline layers disposed under the bit line sidewall spacers to expose the second and third surfaces of the active region; and forming storage contact plugs in contact with the second and third surfaces of the active region.