The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 16, 2014
Filed:
Sep. 17, 2013
Applicant:
Sanyo Electric Co., Ltd., Moriguchi, JP;
Inventor:
Masaki Shima, Uji, JP;
Assignee:
SANYO Electric Co., Ltd., Moriguchi, JP;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 31/0224 (2006.01); C23C 14/14 (2006.01); C23C 14/58 (2006.01); C23C 14/24 (2006.01); H01L 31/18 (2006.01); C23C 14/56 (2006.01); H01L 31/0747 (2012.01); C23C 14/00 (2006.01);
U.S. Cl.
CPC ...
H01L 31/022466 (2013.01); C23C 14/14 (2013.01); C23C 14/5806 (2013.01); C23C 14/24 (2013.01); Y02E 10/50 (2013.01); H01L 31/1884 (2013.01); C23C 14/56 (2013.01); H01L 31/0747 (2013.01); C23C 14/0015 (2013.01);
Abstract
The purpose of the present invention is to favorably modify a transparent conductive film and provide a transparent conductive film with few grain boundaries. In the manufacturing method for the transparent conductive film of the present invention, a transparent conductive filmis formed on a substrateinside a vacuum chamber, after which radiant heat is imparted from a surface modifying devicearranged near the substrateto modify the transparent conductive film, and the substratehaving the modified transparent conductive filmis removed from the vacuum chamber