The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 16, 2014
Filed:
Feb. 23, 2010
Applicants:
Takashi Nakamura, Edogawa-ku, JP;
Hirohisa Ota, Kawagoe, JP;
Eigo Kawakami, Utsunomiya, JP;
Kazuyuki Kasumi, Utsunomiya, JP;
Toshinobu Tokita, Yokohama, JP;
Inventors:
Takashi Nakamura, Edogawa-ku, JP;
Hirohisa Ota, Kawagoe, JP;
Eigo Kawakami, Utsunomiya, JP;
Kazuyuki Kasumi, Utsunomiya, JP;
Toshinobu Tokita, Yokohama, JP;
Assignee:
Canon Kabushiki Kaisha, , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B29C 59/02 (2006.01); G03F 9/00 (2006.01); G03F 7/00 (2006.01); B82Y 10/00 (2011.01); B82Y 40/00 (2011.01);
U.S. Cl.
CPC ...
G03F 9/703 (2013.01); G03F 9/7042 (2013.01); B82Y 10/00 (2013.01); G03F 9/7049 (2013.01); B82Y 40/00 (2013.01); G03F 7/0002 (2013.01);
Abstract
An imprinting machine that brings a mold having a pattern into contact with an object and transfers the pattern onto the object includes a measurement unit that measures a position of the mold when the mold contacts the object.