The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 16, 2014
Filed:
Nov. 12, 2007
Applicant:
Stuart Scollay, Sunnyvale, CA (US);
Inventor:
Stuart Scollay, Sunnyvale, CA (US);
Assignee:
Intevac, Inc., Santa Clara, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); G11B 5/84 (2006.01); H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67742 (2013.01); G11B 5/8404 (2013.01); H01L 21/67346 (2013.01); H01L 21/67709 (2013.01); H01L 21/67748 (2013.01); H01L 21/67751 (2013.01); Y10S 414/139 (2013.01);
Abstract
Disclosed is a substrate processing system with a magnetic conduit configuration to improve the movement of a substrate carrier within the system. The configuration specifically provides for safe, secure movement of a carrier between multiple levels of a substrate processing system by using magnetic conduits to redirect magnetic forces created by a linear motor, permitting the linear motor to be positioned outside of the system and in a location that will not interfere with the movement of the carrier.