The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 16, 2014
Filed:
Sep. 04, 2009
Kui Yao, Singapore, SG;
Saravanan Shanmugavel, Singapore, SG;
Trung Dung Luong, Singapore, SG;
Ajit S. Gaunekar, Singapore, SG;
Hon Yu Peter NG, Hong Kong, HK;
Kui Yao, Singapore, SG;
Saravanan Shanmugavel, Singapore, SG;
Trung Dung Luong, Singapore, SG;
Ajit S. Gaunekar, Singapore, SG;
Hon Yu Peter Ng, Hong Kong, HK;
Agency for Science, Technology and Research, Singapore, SG;
Abstract
The miniaturized piezoelectric accelerometer includes a support frame () having a cavity () and a seismic mass () supported by a plurality of suspension beams () extending from the support frame (). Each of the suspension beams () has a piezoelectric thin film coated on a top surface thereof, with a pair of inter-digital electrodes () deposited on an upper surface of each piezoelectric thin film. The presence of acceleration excites bending and thus strain in the piezoelectric thin film, which in turn causes electrical signals to be generated over terminals of the electrodes (). To collect constructively the output of the electrodes (), one terminal of each of the electrodes () is routed to and electrically connected at a top surface () of the seismic mass ().