The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 09, 2014

Filed:

Feb. 23, 2009
Applicants:

Jürgen Carstensen, Kiel, DE;

Andreas Schütt, Kiel, DE;

Helmut Föll, Mönkeberg, DE;

Wilhelm Warta, Freiburg, DE;

Martin Kasemann, Denzlingen, DE;

Inventors:

Jürgen Carstensen, Kiel, DE;

Andreas Schütt, Kiel, DE;

Helmut Föll, Mönkeberg, DE;

Wilhelm Warta, Freiburg, DE;

Martin Kasemann, Denzlingen, DE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/265 (2006.01); G01R 31/26 (2014.01);
U.S. Cl.
CPC ...
G01R 31/2656 (2013.01); G01R 31/2605 (2013.01);
Abstract

A measuring method and device for characterizing a semiconductor component () having a pn junction and a measuring surface, which has a contacting subarea, covered by a metallization. The method including: A. Planar application of electromagnetic excitation radiation onto the measuring area of the semiconductor component () for separating charge carrier pairs in the semiconductor component (), and B. spatially resolved measurement of electromagnetic radiation originating from the semiconductor component () using a detection unit. In one step A, a predetermined excitation subarea of the measuring surface has a predetermined intensity of the excitation radiation and at least one sink subarea of the measuring surface has an intensity of the excitation radiation which is less than the intensity applied to the excitation subarea. The excitation and sink subareas are disposed on opposite sides of said contacting subarea and adjoin it and/or entirely or partially overlap it.


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